Description
Hamamatsu S10359 Highly reliable quadrant photodiode for ArF excimer laser monitor
The S10359 is a quadrant Si photodiode that has achieved high reliability for ultraviolet light. It exhibits low sensitivity deterioration under UV light irradiation and is suitable for applications such as optical axis alignment or monitoring of intense UV light sources.
Features
– High reliability to ArF excimer laser radiation (λ=193 nm)
– No resin to cause outgassing
– Large active area: 10 × 10 mm/quadrant
Specifications
Number of elements | 4-segment |
---|---|
Package | Metal |
Cooling | Non-cooled |
Spectral response range | 193 to 1000 nm |
Peak sensitivity wavelength (typ.) | 760 nm |
Photosensitivity (typ.) | 0.06 A/W |
Dark current (max.) | 500 pA |
Rise time (typ.) | 1 μs |
Terminal capacitance (typ.) | 500 pF |
Measurement condition | Typ. Ta=25 ℃, per one element (except for photosensitive area), unless otherwise noted, Photosensitivity: λ=193 nm |
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