Description

Hamamatsu S8552 Vacuum UV (VUV) monitoring photodiodes 

 

S8552 have sensitivity in the vacuum UV region. It is specially suitable for excimer laser (ArF: 193 nm, KrF: 248 nm) monitoring.
Its design optimized for use in the VUV region provides improved stability in sensitivity for VUV light irradiation compared to previous products.

 

Features
– Improved reliability for excimer lasers (ArF: 193 nm, KrF: 248 nm)
– Large photosensitive area: 10 × 10 mm
– Windowless package: 16.5 × 15.0 mm ceramic package

 

Notice

The chip of this product is not sealed and is exposed.
Parts such as electrodes on the chip are not protected by an enclosure or window and so require especially strict care during handling compared to ordinary products.

 

Specifications

Photosensitive area	10 × 10 mm
Package	Ceramic
Package category	Unsealed
Cooling	Non-cooled
Reverse voltage (max.)	5 V
Spectral response range	190 to 1000 nm
Photosensitivity (typ.)	0.06 A/W
Dark current (max.)	1000 pA
Rise time (typ.)	9 μs
Terminal capacitance (typ.)	4000 pF
Measurement condition	Typ. Ta=25 ℃, Photosensitivity: λ=193 nm, unless otherwise noted